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- 2005922166 contributor B10391652.
- 2005922166 contributor B10391653.
- 2005922166 contributor B10391654.
- 2005922166 created "c2005.".
- 2005922166 date "2005".
- 2005922166 date "c2005.".
- 2005922166 dateCopyrighted "c2005.".
- 2005922166 description "Includes bibliographical references and index.".
- 2005922166 extent "xiii, 434 p. :".
- 2005922166 identifier "1566774640".
- 2005922166 identifier "9781566774642".
- 2005922166 isPartOf "Proceedings / Electrochemical Society ; v. 2005-06".
- 2005922166 issued "2005".
- 2005922166 issued "c2005.".
- 2005922166 language "eng".
- 2005922166 publisher "Pennington, N.J. : Electrochemical Society,".
- 2005922166 subject "621.3815 23".
- 2005922166 subject "Integrated circuits Congresses.".
- 2005922166 subject "Integrated circuits Ultra large scale integration Congresses.".
- 2005922166 subject "TK7874.76 .I575 2005".
- 2005922166 title "ULSI process integration IV : proceedings of the international symposium / editors, C.L. Claeys ... [et al.] ; sponsoring division, Electronics.".
- 2005922166 type "text".