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- 2005927817 contributor B10396289.
- 2005927817 contributor B10396290.
- 2005927817 contributor B10396291.
- 2005927817 created "c2005.".
- 2005927817 date "2005".
- 2005927817 date "c2005.".
- 2005927817 dateCopyrighted "c2005.".
- 2005927817 description "Includes bibliographic references and indexes.".
- 2005927817 extent "ix, 480 p. :".
- 2005927817 identifier "1566774721".
- 2005927817 identifier "9781566774727".
- 2005927817 isPartOf "Proceedings ; v. 2004-17".
- 2005927817 issued "2005".
- 2005927817 issued "c2005.".
- 2005927817 language "eng".
- 2005927817 publisher "Pennington, NJ : Electrochemical Society,".
- 2005927817 subject "621.39/5 22".
- 2005927817 subject "Electrochemistry Congresses.".
- 2005927817 subject "Integrated circuits Ultra large scale integration Congresses.".
- 2005927817 subject "Microelectromechanical systems Congresses.".
- 2005927817 subject "TK7874.76 .S96 2004".
- 2005927817 title "Electrochemical processes in ULSI and MEMS : proceedings of the international symposium / editors, H. Deligianni ... [et al.].".
- 2005927817 type "text".