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- 2005930731 contributor B10398603.
- 2005930731 contributor B10398604.
- 2005930731 contributor B10398605.
- 2005930731 created "c2005.".
- 2005930731 date "2005".
- 2005930731 date "c2005.".
- 2005930731 dateCopyrighted "c2005.".
- 2005930731 description "Includes bibliographical references and indexes.".
- 2005930731 extent "xi, 379 p. :".
- 2005930731 identifier "1566774292 (hbk.)".
- 2005930731 identifier "9781566774291 (hbk.)".
- 2005930731 isPartOf "ECS transactions ; v. 1 no. 3".
- 2005930731 issued "2005".
- 2005930731 issued "c2005.".
- 2005930731 language "eng".
- 2005930731 publisher "Pennington, N.J. : Electrochemical Society,".
- 2005930731 subject "Semiconductor wafers Cleaning Congresses.".
- 2005930731 subject "TK7871.85 .C556 2005".
- 2005930731 title "Cleaning technology in semiconductor device manufacturing IX / editors, J. Ruzyllo ... [et al.] ; sponsoring Divisions: Electronics and Photonics, Dielectrics Science and Technology.".
- 2005930731 type "text".