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- 2005931820 contributor B10399476.
- 2005931820 contributor B10399477.
- 2005931820 contributor B10399478.
- 2005931820 created "2005.".
- 2005931820 date "2005".
- 2005931820 date "2005.".
- 2005931820 dateCopyrighted "2005.".
- 2005931820 description "Includes bibliographical references and index.".
- 2005931820 extent "xx, 667 p. :".
- 2005931820 identifier "0735402779".
- 2005931820 identifier 2005931820-d.html.
- 2005931820 isPartOf "AIP conference proceedings ; no.788.".
- 2005931820 isPartOf "AIP conference proceedings, 0094-243X ; v. 788".
- 2005931820 issued "2005".
- 2005931820 issued "2005.".
- 2005931820 language "eng".
- 2005931820 publisher "Melville, N.Y. : American Institute of Physics,".
- 2005931820 subject "621.39/5 22".
- 2005931820 subject "Integrated circuits Ultra large scale integration Congresses Software.".
- 2005931820 subject "Integrated circuits Ultra large scale integration Congresses.".
- 2005931820 subject "TK7874.76 .I56 2005".
- 2005931820 title "Characterization and metrology for ULSI technology / editors, David G. Seiler ... [et al.]".
- 2005931820 type "text".