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- 2005934958 contributor B10401887.
- 2005934958 created "2005-2006.".
- 2005934958 date "2005".
- 2005934958 date "2005-2006.".
- 2005934958 dateCopyrighted "2005-2006.".
- 2005934958 description "1. The relationships between thin film processing and structure -- The effects .".
- 2005934958 extent "2 v. ; 24 cm.".
- 2005934958 identifier "008044640X (v. 1)".
- 2005934958 identifier 2005934958-d.html.
- 2005934958 issued "2005".
- 2005934958 issued "2005-2006.".
- 2005934958 language "eng".
- 2005934958 publisher "Amsterdam ; Boston : Elsevier,".
- 2005934958 subject "Microelectronics.".
- 2005934958 subject "TK7871.15.F5 M32 2005".
- 2005934958 subject "Thin films.".
- 2005934958 tableOfContents "1. The relationships between thin film processing and structure -- The effects .".
- 2005934958 title "Materials science in microelectronics / E.S. Machlin.".
- 2005934958 type "text".