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- 2006274560 alternative "Annual BACUS Symposium on Photomask Technology".
- 2006274560 alternative "BACUS Symposium on Photomask Technology".
- 2006274560 alternative "Photomask technology".
- 2006274560 alternative "Symposium on Photomask Technology and Management.".
- 2006274560 alternative "Symposium on Photomask Technology".
- 2006274560 contributor B10476829.
- 2006274560 contributor B10476830.
- 2006274560 contributor B10476831.
- 2006274560 created "c2005.".
- 2006274560 date "2005".
- 2006274560 date "c2005.".
- 2006274560 dateCopyrighted "c2005.".
- 2006274560 description "Includes bibliographical references and author index.".
- 2006274560 extent "2 v. :".
- 2006274560 identifier "0819460141 (pbk.)".
- 2006274560 isPartOf "Proceedings of SPIE--the International Society for Optical Engineering ; v. 5992.".
- 2006274560 isPartOf "SPIE proceedings series ; v. 5992".
- 2006274560 issued "2005".
- 2006274560 issued "c2005.".
- 2006274560 language "eng".
- 2006274560 publisher "Bellingham, Wash. : SPIE,".
- 2006274560 subject "Integrated circuits Masks Congresses.".
- 2006274560 subject "Microlithography Congresses.".
- 2006274560 subject "TK7874 .S9434 2005".
- 2006274560 title "25th Annual BACUS Symposium on Photomask Technology : 4-7 October, 2005, Monterey, California, USA / J. Tracy Weed, Patrick M. Martin, chairs/editors ; sponsored by BACUS--the International Technical Group of SPIE dedicated to the advancement of photomask technology [and] SPIE--the International Society for Optical Engineering ; published by SPIE--the International Society for Optical Engineering.".
- 2006274560 title "Annual BACUS Symposium on Photomask Technology".
- 2006274560 title "BACUS Symposium on Photomask Technology".
- 2006274560 title "Photomask technology".
- 2006274560 title "Symposium on Photomask Technology".
- 2006274560 type "text".