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- 2006277413 contributor B10480377.
- 2006277413 contributor B10480378.
- 2006277413 contributor B10480379.
- 2006277413 created "c2005.".
- 2006277413 date "2005".
- 2006277413 date "c2005.".
- 2006277413 dateCopyrighted "c2005.".
- 2006277413 description "Includes bibliographical references and indexes.".
- 2006277413 extent "xv, 525 p. :".
- 2006277413 identifier "1558998268".
- 2006277413 identifier 2006277413-d.html.
- 2006277413 identifier 2006277413.html.
- 2006277413 isPartOf "Materials Research Society symposia proceedings ; v. 872.".
- 2006277413 isPartOf "Materials Research Society symposium proceedings ; v. 872".
- 2006277413 issued "2005".
- 2006277413 issued "c2005.".
- 2006277413 language "eng".
- 2006277413 publisher "Warrendale, Pa. : Materials Research Society,".
- 2006277413 subject "620/.5 22".
- 2006277413 subject "Microelectromechanical systems Congresses.".
- 2006277413 subject "Nanotechnology Congresses.".
- 2006277413 subject "TK7875 .M49 2005".
- 2006277413 title "Micro- and nanosystems--materials and devices : symposium held March 28-April 1, 2005, San Francisco, California, U.S.A. / editors: Cengiz S. Ozkan ... [et al.].".
- 2006277413 type "text".