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- 2006278112 contributor B10481287.
- 2006278112 contributor B10481288.
- 2006278112 created "c2006.".
- 2006278112 date "2006".
- 2006278112 date "c2006.".
- 2006278112 dateCopyrighted "c2006.".
- 2006278112 description "Includes bibliographical references and author index.".
- 2006278112 extent "1 v. (various pagings) :".
- 2006278112 identifier "0819461512".
- 2006278112 isPartOf "Proceedings of SPIE ; v. 6109".
- 2006278112 isPartOf "Proceedings of SPIE--the International Society for Optical Engineering ; v. 6109.".
- 2006278112 issued "2006".
- 2006278112 issued "c2006.".
- 2006278112 language "eng".
- 2006278112 publisher "Bellingham, Wash. : SPIE,".
- 2006278112 subject "671.3/5 22".
- 2006278112 subject "Electromechanical devices Design and construction Congresses.".
- 2006278112 subject "Microfabrication Congresses.".
- 2006278112 subject "Micromachining Congresses.".
- 2006278112 subject "TJ1191.5 .M55243232 2006".
- 2006278112 title "Micromachining and microfabrication process technology XI : 25 January, 2005, San Jose, California, USA / Mary Ann Maher, Harold D. Stewart, Jung-Chih Chiao, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering.".
- 2006278112 type "text".