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- 2006278941 contributor B10482269.
- 2006278941 created "c2005.".
- 2006278941 date "2005".
- 2006278941 date "c2005.".
- 2006278941 dateCopyrighted "c2005.".
- 2006278941 extent "xxiii, 295 p. :".
- 2006278941 identifier "4990247221".
- 2006278941 issued "2005".
- 2006278941 issued "c2005.".
- 2006278941 language "eng".
- 2006278941 publisher "Tokyo, Japan : Japan Society of Applied Physics,".
- 2006278941 subject "MLCM 2006/42300 (T)".
- 2006278941 title "Digest of papers microprocesses and nanotechnology 2005 : 2005 International Microprocesses and Nanotechnology Conference, October 25-28, 2005, conference (October 25 technical seminar, 26-28 conference), Hotel Bellclassic Tokyo, Japan / sponsored by the Japan Society of Applied Physics, technical-cosponsored IEEE Electron Device Society ; cooperation American Vacuum Society ... [et al.].".
- 2006278941 type "text".