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- 2006279144 contributor B10482512.
- 2006279144 contributor B10482513.
- 2006279144 created "c2006.".
- 2006279144 date "2006".
- 2006279144 date "c2006.".
- 2006279144 dateCopyrighted "c2006.".
- 2006279144 description "Includes bibliographical references and author index.".
- 2006279144 extent "1 v. (various pagings) :".
- 2006279144 identifier "0819461520 (pbk.)".
- 2006279144 identifier 2006279144.html.
- 2006279144 isPartOf "Proceedings of SPIE, 0277-786X ; v. 6110".
- 2006279144 isPartOf "Proceedings of SPIE--the International Society for Optical Engineering ; v. 6110.".
- 2006279144 issued "2006".
- 2006279144 issued "c2006.".
- 2006279144 language "eng".
- 2006279144 publisher "Bellingham, Wash. : SPIE,".
- 2006279144 subject "621.381 22".
- 2006279144 subject "Integrated optics Congresses.".
- 2006279144 subject "Microelectromechanical systems Congresses.".
- 2006279144 subject "Micromachining Congresses.".
- 2006279144 subject "Miniature electronic equipment Design and construction Congresses.".
- 2006279144 subject "Optoelectronic devices Design and construction Congresses.".
- 2006279144 subject "TA1660 .M5372 2006".
- 2006279144 title "Micromachining technology for micro-optics and nano-optics IV : 23-25 January 2006, San Jose, California, USA / Eric G. Johnson, Gregory P. Nordin, Thomas J. Suleski, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering.".
- 2006279144 type "text".