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- 2006281963 contributor B10486182.
- 2006281963 contributor B10486183.
- 2006281963 created "c2006.".
- 2006281963 date "2006".
- 2006281963 date "c2006.".
- 2006281963 dateCopyrighted "c2006.".
- 2006281963 description "Includes bibliographical references and author index.".
- 2006281963 extent "1 v. (various pagings) :".
- 2006281963 identifier "0819461997".
- 2006281963 isPartOf "Proceedings of SPIE, 0277-786X ; v. 6156".
- 2006281963 isPartOf "Proceedings of SPIE--the International Society for Optical Engineering ; v. 6156.".
- 2006281963 issued "2006".
- 2006281963 issued "c2006.".
- 2006281963 language "eng".
- 2006281963 publisher "Bellingham, Wash. : SPIE,".
- 2006281963 subject "621.382 22".
- 2006281963 subject "Integrated circuits Defects Analysis Congresses.".
- 2006281963 subject "Integrated circuits Design and construction Congresses.".
- 2006281963 subject "Microelectronics industry Quality control Congresses.".
- 2006281963 subject "Quality control Congresses.".
- 2006281963 subject "Semiconductor wafers Defects Analysis Congresses.".
- 2006281963 subject "Semiconductors Design and construction Congresses.".
- 2006281963 subject "TK7874 .D47463 2006".
- 2006281963 title "Design and process integration for microelectronic manufacturing IV : 23-24 February, 2006, San Jose, California, USA / Alfred K.K. Wong, Vivek, K. Singh, chairs/editors ; cooperating organization, SEMATECH, Inc (USA) ; sponsored and published by SPIE--the International Society for Optical Engineering.".
- 2006281963 type "text".