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- 2006282012 alternative "MEMS, MOEMS, and NEMS".
- 2006282012 contributor B10486262.
- 2006282012 contributor B10486263.
- 2006282012 created "c2006.".
- 2006282012 date "2006".
- 2006282012 date "c2006.".
- 2006282012 dateCopyrighted "c2006.".
- 2006282012 description "Includes bibliographical references and author index.".
- 2006282012 extent "1 v. (various pagings) :".
- 2006282012 identifier "081946063X".
- 2006282012 isPartOf "Proceedings of SPIE ; v. 6032".
- 2006282012 isPartOf "Proceedings of SPIE--the International Society for Optical Engineering ; v. 6032.".
- 2006282012 issued "2006".
- 2006282012 issued "c2006.".
- 2006282012 language "eng".
- 2006282012 publisher "Bellingham, Wash. : SPIE,".
- 2006282012 subject "621 22".
- 2006282012 subject "Imaging systems Congresses.".
- 2006282012 subject "Microelectromechanical systems Congresses.".
- 2006282012 subject "Nanostructured materials Congresses.".
- 2006282012 subject "Nanotechnology Congresses.".
- 2006282012 subject "Optoelectronic devices Congresses.".
- 2006282012 subject "TK7875 .I26 2005".
- 2006282012 title "ICO20 : MEMS, MOEMS, and NEMS : 21-26 August, 2005, Changchun, China / Masayoshi Esashi, Zhaoying Zhou, chairs/editors ; organized by ICO--International Commission for Optics ...[et al.] ; sponsored by AFOSR Asia Office ... [et al.] ; published by SPIE--the International Society for Optical Engineering.".
- 2006282012 title "MEMS, MOEMS, and NEMS".
- 2006282012 type "text".