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- 2006282918 contributor B10487442.
- 2006282918 contributor B10487443.
- 2006282918 created "c2006.".
- 2006282918 date "2006".
- 2006282918 date "c2006.".
- 2006282918 dateCopyrighted "c2006.".
- 2006282918 description "Includes bibliographical references and index.".
- 2006282918 extent "1 v. (various pagings) :".
- 2006282918 identifier "0819460680".
- 2006282918 identifier 2006282918.html.
- 2006282918 isPartOf "Proceedings of SPIE, 0277-786X ; v. 6037".
- 2006282918 isPartOf "Proceedings of SPIE--the International Society for Optical Engineering ; v. 6037.".
- 2006282918 issued "2006".
- 2006282918 issued "c2006.".
- 2006282918 language "eng".
- 2006282918 publisher "Bellingham, Wash. : SPIE,".
- 2006282918 subject "621.381 22".
- 2006282918 subject "Microelectromechanical systems Congresses.".
- 2006282918 subject "Photolithography Congresses.".
- 2006282918 subject "Photomechanical processes Congresses.".
- 2006282918 subject "Photonics Congresses.".
- 2006282918 subject "TK7875 .D4825 2006".
- 2006282918 title "Device and process technologies for microelectronics, MEMS, and photonics IV : 12-14 December 2005, Brisbane, Australia / Jung-Chih Chiao ... [et al.], chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering ; cosponsored by Queensland University of Technology (Australia) ... [et al.] ; cooperating organizations, University of Adelaide (Australia) [and] Centre for Biomedical Engineering, Adelaide (Australia).".
- 2006282918 type "text".