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- 2006284939 contributor B10489942.
- 2006284939 created "c2004.".
- 2006284939 date "2004".
- 2006284939 date "c2004.".
- 2006284939 dateCopyrighted "c2004.".
- 2006284939 description "Includes bibliographical references and index.".
- 2006284939 description "Introduction / M.J. Anc -- Overview of SIMOX technology: historical perspective / K. Izumi -- Fundamental processes in SIMOX layer formation: ion implantation and oxide growth / P.L.F. Hemment -- SIMOX/SOI processes: flexibility based on thermodynamic considerations / A. Ogura -- Electrical and optical characterisation of SIMOX substrates / H. Hovel -- SIMOX material technology from R&D to advanced products / D.K. Sadana.".
- 2006284939 extent "xvi, 143 p. :".
- 2006284939 identifier "086341334X".
- 2006284939 identifier 2006284939.html.
- 2006284939 isPartOf "EMIS processing series ; no. 4.".
- 2006284939 isPartOf "Processing series ; no. 4".
- 2006284939 issued "2004".
- 2006284939 issued "c2004.".
- 2006284939 language "eng".
- 2006284939 publisher "London : Institution of Electrical Engineers,".
- 2006284939 subject "621.31937 22".
- 2006284939 subject "Silicon-on-insulator technology.".
- 2006284939 subject "TK7871.85 .S5554 2004".
- 2006284939 tableOfContents "Introduction / M.J. Anc -- Overview of SIMOX technology: historical perspective / K. Izumi -- Fundamental processes in SIMOX layer formation: ion implantation and oxide growth / P.L.F. Hemment -- SIMOX/SOI processes: flexibility based on thermodynamic considerations / A. Ogura -- Electrical and optical characterisation of SIMOX substrates / H. Hovel -- SIMOX material technology from R&D to advanced products / D.K. Sadana.".
- 2006284939 title "SIMOX / edited by Maria J. Anc.".
- 2006284939 type "text".