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- 2006284940 contributor B10489943.
- 2006284940 contributor B10489944.
- 2006284940 created "c2002.".
- 2006284940 date "2002".
- 2006284940 date "c2002.".
- 2006284940 dateCopyrighted "c2002.".
- 2006284940 description "Includes bibliographical references and index.".
- 2006284940 extent "xxv, 149 p. :".
- 2006284940 identifier "0852960395".
- 2006284940 identifier 2006284940-d.html.
- 2006284940 identifier 2006284940.html.
- 2006284940 isPartOf "EMIS processing series ; no. 1".
- 2006284940 issued "2002".
- 2006284940 issued "c2002.".
- 2006284940 language "eng".
- 2006284940 publisher "London : Institution of Electrical Engineers,".
- 2006284940 subject "621.38152 21".
- 2006284940 subject "Integrated circuits Very large scale integration.".
- 2006284940 subject "Microelectromechanical systems.".
- 2006284940 subject "Silicon-on-insulator technology.".
- 2006284940 subject "TK7871.85 .S549 2002".
- 2006284940 title "Silicon wafer bonding technology : for VLSI and MEMS applications / edited by Subramanian S. Iyer and Andre J. Auberton-Hervé.".
- 2006284940 type "text".