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- 2006285630 alternative "ICMNE-2005".
- 2006285630 alternative "Micro- and nanotechnologies 2005".
- 2006285630 contributor B10490860.
- 2006285630 contributor B10490861.
- 2006285630 contributor B10490862.
- 2006285630 created "c2006.".
- 2006285630 date "2006".
- 2006285630 date "c2006.".
- 2006285630 dateCopyrighted "c2006.".
- 2006285630 description "Includes bibliographical references and author index.".
- 2006285630 extent "1 v. (various pagings) :".
- 2006285630 identifier "0819463256".
- 2006285630 isPartOf "Proceedings of SPIE, 0277-786X ; v. 6260".
- 2006285630 isPartOf "Proceedings of SPIE--the International Society for Optical Engineering ; v. 6260.".
- 2006285630 issued "2006".
- 2006285630 issued "c2006.".
- 2006285630 language "eng".
- 2006285630 publisher "Bellingham, Wash., USA : SPIE,".
- 2006285630 subject "621.381 22".
- 2006285630 subject "Lithography Congresses.".
- 2006285630 subject "Microelectronics Congresses.".
- 2006285630 subject "Nanotechnology Congresses.".
- 2006285630 subject "Photonics Materials Congresses.".
- 2006285630 subject "TK7874 .I322 2005".
- 2006285630 title "ICMNE-2005".
- 2006285630 title "Micro- and nanoelectronics 2005 : 3-7 October 2005, Zvenigorod, Russia / Kamil A. Valiev, Alexander A. Orlikovsky, chairs/editors ; organized by FTIAN--Institute of Physics and Technology (Russia) [and] SPIE Russia Chapter ; sponsored by Ministry of Education and Science of the Russian Federation (Russia) ... [et al.] ; published by SPIE--the International Society for Optical Engineering.".
- 2006285630 title "Micro- and nanotechnologies 2005".
- 2006285630 type "text".