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- 2006285647 alternative "22nd European Mask and Lithography Conference".
- 2006285647 alternative "European Conference on Mask Technology for Integrated Circuits and Microcomponents".
- 2006285647 alternative "European Mask and Lithography Conference".
- 2006285647 contributor B10490900.
- 2006285647 contributor B10490901.
- 2006285647 contributor B10490902.
- 2006285647 created "c2006.".
- 2006285647 date "2006".
- 2006285647 date "c2006.".
- 2006285647 dateCopyrighted "c2006.".
- 2006285647 description "Includes bibliographical references and author index.".
- 2006285647 extent "1 v. (various pagings) :".
- 2006285647 identifier "0819463566".
- 2006285647 identifier 2006285647.html.
- 2006285647 isPartOf "Proceedings of SPIE, 0277-786X ; v. 6281".
- 2006285647 isPartOf "Proceedings of SPIE--the International Society for Optical Engineering ; v. 6281.".
- 2006285647 issued "2006".
- 2006285647 issued "c2006.".
- 2006285647 language "eng".
- 2006285647 publisher "Bellingham, Wash., : SPIE,".
- 2006285647 subject "621.3815 22".
- 2006285647 subject "Integrated circuits Masks Congresses.".
- 2006285647 subject "Microlithography Congresses.".
- 2006285647 subject "TK7872.M3 E98 2006".
- 2006285647 title "22nd European Mask and Lithography Conference".
- 2006285647 title "EMLC 2006 : 22nd European Mask and Lithography Conference : 23-26 January 2006, Dresden, Germany / Uwe F.W. Behringer, chair/editor ; organized by VDE/VDI GMM--the Society for Microelectronics, Micro- and Precision Engineering (Germany) ; cooperating organizations, BACUS--the international technical group of SPIE dedicated to the advancement of photomask technology ... [et al.] ; published by SPIE--the International Society for Optical Engineering.".
- 2006285647 title "European Conference on Mask Technology for Integrated Circuits and Microcomponents".
- 2006285647 title "European Mask and Lithography Conference".
- 2006285647 type "text".