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- 2006286573 contributor B10491993.
- 2006286573 contributor B10491994.
- 2006286573 created "c2004.".
- 2006286573 date "2004".
- 2006286573 date "c2004.".
- 2006286573 dateCopyrighted "c2004.".
- 2006286573 description "Includes bibliographical references and index.".
- 2006286573 extent "xviii, 279 p. :".
- 2006286573 identifier "0863413528".
- 2006286573 identifier 2006286573.html.
- 2006286573 isPartOf "EMIS processing series ; no. 5.".
- 2006286573 isPartOf "Processing series ; no. 5".
- 2006286573 issued "2004".
- 2006286573 issued "c2004.".
- 2006286573 language "eng".
- 2006286573 publisher "London : Institution of Electrical Engineers,".
- 2006286573 subject "621.3815 22".
- 2006286573 subject "Integrated circuits Materials.".
- 2006286573 subject "QD181.S6 S4413 2004".
- 2006286573 subject "Silicides.".
- 2006286573 title "Silicide technology for integrated circuits / edited by Lih J. Chen.".
- 2006286573 type "text".