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- 2006296404 contributor B10495273.
- 2006296404 created "c2006.".
- 2006296404 date "2006".
- 2006296404 date "c2006.".
- 2006296404 dateCopyrighted "c2006.".
- 2006296404 description "Includes bibliographical references and index.".
- 2006296404 extent "xxii, 507 p. :".
- 2006296404 identifier "3527312463 (hbk.)".
- 2006296404 identifier "9783527312463".
- 2006296404 identifier 2006296404-b.html.
- 2006296404 identifier 2006296404-d.html.
- 2006296404 identifier 2006296404-t.html.
- 2006296404 isPartOf "Advanced micro & nanosystems ; 5.".
- 2006296404 issued "2006".
- 2006296404 issued "c2006.".
- 2006296404 language "eng".
- 2006296404 publisher "Weinheim : Wiley-VCH ,".
- 2006296404 subject "670.42 22".
- 2006296404 subject "Microtechnology.".
- 2006296404 subject "Production engineering.".
- 2006296404 subject "TS183 .M52 2006".
- 2006296404 title "Micro process engineering : fundamentals, devices, fabrication, and applications / volume editor : Norbert Kockmann.".
- 2006296404 type "text".