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- 2006296774 contributor B10495718.
- 2006296774 contributor B10495719.
- 2006296774 created "c2005.".
- 2006296774 date "2005".
- 2006296774 date "c2005.".
- 2006296774 dateCopyrighted "c2005.".
- 2006296774 description "Includes bibliographical references and author index.".
- 2006296774 extent "xxi, 772 p. :".
- 2006296774 identifier "079184224X".
- 2006296774 isPartOf "MEMS (Series) (American Society of Mechanical Engineers) ; v. 7.".
- 2006296774 isPartOf "MEMS ; vol. 7".
- 2006296774 issued "2005".
- 2006296774 issued "c2005.".
- 2006296774 language "eng".
- 2006296774 publisher "New York, N.Y. : ASME,".
- 2006296774 subject "621.3 22".
- 2006296774 subject "Fluidic devices Congresses.".
- 2006296774 subject "Microelectromechanical systems Congresses.".
- 2006296774 subject "TK7875 .M53245 2005".
- 2006296774 title "Micro-electro-mechanical systems--2005 : presented at 2005 ASME International Mechanical Engineering Congress and Exposition : November 5-11, 2005, Orlando, Florida, USA / sponsored by the Micro-Electro-Mechanical Systems Division, ASME.".
- 2006296774 type "text".