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- 2006378056 alternative "Development of basic technology for 50nm next generation lithography".
- 2006378056 contributor B10570954.
- 2006378056 created "2005.".
- 2006378056 date "2005".
- 2006378056 date "2005.".
- 2006378056 dateCopyrighted "2005.".
- 2006378056 extent "259 p. :".
- 2006378056 identifier 2006378056.html.
- 2006378056 issued "2005".
- 2006378056 issued "2005.".
- 2006378056 language "Summary and table of contents also in English.".
- 2006378056 language "kor eng eng".
- 2006378056 language "kor".
- 2006378056 publisher "[Taejŏn Kwangyŏksi] : ETRI ; [Seoul] : Chŏngbo Tʻongsinbu,".
- 2006378056 subject "Microlithography.".
- 2006378056 subject "TK7874 .A127 2005".
- 2006378056 title "880-01 50nm-kŭp chʻasedae lisogŭraepʻi kisul kaebal saŏp = Development of basic technology for 50nm next generation lithography.".
- 2006378056 title "Development of basic technology for 50nm next generation lithography".
- 2006378056 type "text".