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- 2006920112 contributor B10733078.
- 2006920112 created "c2006.".
- 2006920112 date "2006".
- 2006920112 date "c2006.".
- 2006920112 dateCopyrighted "c2006.".
- 2006920112 description "Includes bibliographical references (p. [227]-242) and index.".
- 2006920112 extent "xi, 250 p. :".
- 2006920112 identifier "3540313338 (hbk. alk. paper)".
- 2006920112 identifier "9783540313335 (hbk. alk. paper)".
- 2006920112 isPartOf "Microtechnology and MEMS, 1615-8326".
- 2006920112 issued "2006".
- 2006920112 issued "c2006.".
- 2006920112 language "eng".
- 2006920112 publisher "Berlin : Springer-Verlag,".
- 2006920112 subject "621.36 22".
- 2006920112 subject "Microelectromechanical systems.".
- 2006920112 subject "Microelectronics.".
- 2006920112 subject "Photonics.".
- 2006920112 subject "TA1520 .U35 2006".
- 2006920112 title "Micromechanical photonics / H. Ukita.".
- 2006920112 type "text".