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- 2007013450 contributor B10764848.
- 2007013450 contributor B10764849.
- 2007013450 created "2008.".
- 2007013450 date "2008".
- 2007013450 date "2008.".
- 2007013450 dateCopyrighted "2008.".
- 2007013450 description "Includes bibliographical references and index.".
- 2007013450 extent "xiv, 647 p. :".
- 2007013450 identifier "0195320174 (pbk. : alk. paper)".
- 2007013450 identifier "9780195320176 (pbk. : alk. paper)".
- 2007013450 identifier 2007013450.html.
- 2007013450 isPartOf "The Oxford series in electrical and computer engineering".
- 2007013450 issued "2008".
- 2007013450 issued "2008.".
- 2007013450 language "eng".
- 2007013450 publisher "New York : Oxford University Press,".
- 2007013450 subject "621.3815/2 22".
- 2007013450 subject "Semiconductors Design and construction.".
- 2007013450 subject "TK7871.85 .C25 2008".
- 2007013450 title "Fabrication engineering at the micro and nanoscale / Stephen A. Campbell.".
- 2007013450 type "text".