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- 2007015557 contributor B10767361.
- 2007015557 created "2008.".
- 2007015557 date "2008".
- 2007015557 date "2008.".
- 2007015557 dateCopyrighted "2008.".
- 2007015557 description "Includes bibliographical references and index.".
- 2007015557 extent "xxv, 734 p. :".
- 2007015557 identifier "9780471719199".
- 2007015557 identifier 2007015557-d.html.
- 2007015557 identifier 2007015557-b.html.
- 2007015557 identifier 2007015557.html.
- 2007015557 issued "2008".
- 2007015557 issued "2008.".
- 2007015557 language "eng".
- 2007015557 publisher "Hoboken, N.J. : John Wiley,".
- 2007015557 subject "621.3815 22".
- 2007015557 subject "Chemical mechanical planarization.".
- 2007015557 subject "Integrated circuits Design and construction.".
- 2007015557 subject "Microelectronics Materials.".
- 2007015557 subject "TK7874 .M4675 2008".
- 2007015557 title "Microelectronic applications of chemical mechanical planarization / edited by Yuzhuo Li.".
- 2007015557 type "text".