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- 2007044548 contributor B10802467.
- 2007044548 created "c2007.".
- 2007044548 date "2007".
- 2007044548 date "c2007.".
- 2007044548 dateCopyrighted "c2007.".
- 2007044548 description "Includes bibliographical references and index.".
- 2007044548 extent "xvii, 515 p. :".
- 2007044548 identifier "0470018933".
- 2007044548 identifier "0470727306 (pbk.)".
- 2007044548 identifier "9780470018934".
- 2007044548 identifier "9780470727300 (pbk.)".
- 2007044548 identifier 2007044548-d.html.
- 2007044548 identifier 2007044548-t.html.
- 2007044548 identifier 2007044548-b.html.
- 2007044548 issued "2007".
- 2007044548 issued "c2007.".
- 2007044548 language "eng".
- 2007044548 publisher "Chichester, West Sussex, England ; Hoboken, NJ, USA : Wiley,".
- 2007044548 subject "621.3815/31 22".
- 2007044548 subject "Integrated circuits Design and construction.".
- 2007044548 subject "Microlithography Industrial applications.".
- 2007044548 subject "TK7874 .M196 2007".
- 2007044548 title "Fundamental principles of optical lithography : the science of microfabrication / Chris Mack.".
- 2007044548 type "text".