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- 2007271570 contributor B10815849.
- 2007271570 contributor B10815850.
- 2007271570 created "2006.".
- 2007271570 date "2006".
- 2007271570 date "2006.".
- 2007271570 dateCopyrighted "2006.".
- 2007271570 description "Includes bibliographical references and author index.".
- 2007271570 extent "1 v. (various pagings) :".
- 2007271570 identifier "0819462446 (pbk.)".
- 2007271570 identifier "9780819462442".
- 2007271570 isPartOf "Proceedings of SPIE, 0277-786X ; v. 6188".
- 2007271570 isPartOf "Proceedings of SPIE--the International Society for Optical Engineering ; v. 6188.".
- 2007271570 issued "2006".
- 2007271570 issued "2006.".
- 2007271570 language "eng".
- 2007271570 publisher "Bellingham, Wash. : SPIE,".
- 2007271570 subject "681/.25 22".
- 2007271570 subject "Metrology Congresses.".
- 2007271570 subject "Microscopy Congresses.".
- 2007271570 subject "Optical measurements Congresses.".
- 2007271570 subject "Optical measurements Industrial applications Congresses.".
- 2007271570 subject "Photonics Congresses.".
- 2007271570 subject "QC367 .O589 2006".
- 2007271570 subject "TR692.5 .S66 v. 6188".
- 2007271570 title "Optical micro- and nanometrology in microsystems technology : 5-7 April 2006, Strasbourg, France / Christophe Gorecki, Anand K. Asundi, Wolfgang Osten, chairs/editors ; sponsored by SPIE Europe ; cosponsored by Conseil general du Bas-Rhin (France) ... [et al.] ; cooperating organizations CNOP--Comité national d'optique et de photonique (France) ... [et al.].".
- 2007271570 type "text".