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- 2007281789 contributor B10828486.
- 2007281789 contributor B10828487.
- 2007281789 created "c2007.".
- 2007281789 date "2007".
- 2007281789 date "c2007.".
- 2007281789 dateCopyrighted "c2007.".
- 2007281789 description "Includes bibliographical references and author index.".
- 2007281789 extent "1 v. (various pagings) :".
- 2007281789 identifier "0819467596".
- 2007281789 identifier "9780819467591".
- 2007281789 identifier 2007281789.html.
- 2007281789 isPartOf "Proceedings of SPIE, 0277-786X ; v. 6617".
- 2007281789 isPartOf "Proceedings of SPIE--the International Society for Optical Engineering ; v. 6617.".
- 2007281789 issued "2007".
- 2007281789 issued "c2007.".
- 2007281789 language "eng".
- 2007281789 publisher "Bellingham, Wash. : SPIE,".
- 2007281789 subject "681/.25 22".
- 2007281789 subject "Integrated circuits Congresses.".
- 2007281789 subject "Optical measurements Congresses.".
- 2007281789 subject "QC367 .M635 2007".
- 2007281789 subject "Semiconductors Design and construction Congresses.".
- 2007281789 title "Modeling aspects in optical metrology : 18-19 June 2007, Munich, Germany / Harald Bosse, Bernd Bodermann, Richard M. Silver, editors ; sponsored by SPIE Europe ; cooperating organizations, EOS--European Optical Society [and] WLT--Wissenschaftliche Gesellschaft Lasertechnik e.V. (Germany).".
- 2007281789 type "text".