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- 2007281794 contributor B10828495.
- 2007281794 contributor B10828496.
- 2007281794 created "c2007.".
- 2007281794 date "2007".
- 2007281794 date "c2007.".
- 2007281794 dateCopyrighted "c2007.".
- 2007281794 description "Includes bibliographical references and author index.".
- 2007281794 extent "1 v. (various pagings) :".
- 2007281794 identifier "9780819466402 (pbk.)".
- 2007281794 isPartOf "Proceedings of SPIE, 0277-786X ; v. 6521".
- 2007281794 isPartOf "Proceedings of SPIE--the International Society for Optical Engineering ; v. 6521.".
- 2007281794 issued "2007".
- 2007281794 issued "c2007.".
- 2007281794 language "eng".
- 2007281794 publisher "Bellingham, Wash. : SPIE,".
- 2007281794 subject "621.382 22".
- 2007281794 subject "Integrated circuits Defects Analysis Congresses.".
- 2007281794 subject "Integrated circuits Design and construction Congresses.".
- 2007281794 subject "Microelectronics industry Quality control Congresses.".
- 2007281794 subject "Quality control Congresses.".
- 2007281794 subject "Semiconductor wafers Defects Analysis Congresses.".
- 2007281794 subject "Semiconductors Design and construction Congresses.".
- 2007281794 subject "TK7874 .D474976 2007".
- 2007281794 title "Design for manufacturability through design-process integration: 28 February-2 March 2007, San Jose, California, USA / Alfred K.K. Wong, Vivek, K. Singh, editors ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organization, SEMATECH (USA).".
- 2007281794 type "text".