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- 2007281823 alternative "Sub-second rapid thermal processing for device fabrication".
- 2007281823 contributor B10828549.
- 2007281823 contributor B10828550.
- 2007281823 contributor B10828551.
- 2007281823 created "c2006.".
- 2007281823 date "2006".
- 2007281823 date "c2006.".
- 2007281823 dateCopyrighted "c2006.".
- 2007281823 description "Includes bibliographical references and indexes.".
- 2007281823 extent "xi, 213 p. :".
- 2007281823 identifier "9781558998681 (hbk.)".
- 2007281823 isPartOf "Materials Research Society symposia proceedings ; v. 912.".
- 2007281823 isPartOf "Materials Research Society symposium proceedings ; v. 912".
- 2007281823 issued "2006".
- 2007281823 issued "c2006.".
- 2007281823 language "eng".
- 2007281823 publisher "Warrendale, Pa. : Materials Research Society,".
- 2007281823 subject "621.3815/2 22".
- 2007281823 subject "Semiconductor doping Congresses.".
- 2007281823 subject "Semiconductors Design and construction Congresses.".
- 2007281823 subject "Semiconductors Materials Congresses.".
- 2007281823 subject "TK7871.85 .D66 2006".
- 2007281823 title "Doping engineering for device fabrication : symposium held April 18-19, 2006, San Francisco, California, U.S.A. / editors, B.J. Pawlak ... [et al.].".
- 2007281823 title "Sub-second rapid thermal processing for device fabrication".
- 2007281823 type "text".