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- 2007296136 alternative "Reliability, testing and characterization of MEMS/MOEMS VI.".
- 2007296136 contributor B10831061.
- 2007296136 contributor B10831062.
- 2007296136 created "c2007.".
- 2007296136 date "2007".
- 2007296136 date "c2007.".
- 2007296136 dateCopyrighted "c2007.".
- 2007296136 description "Includes bibliographical references and author index.".
- 2007296136 extent "1 v. (various pagings) :".
- 2007296136 identifier "0819465763".
- 2007296136 identifier "9780819465764".
- 2007296136 identifier 2007296136.html.
- 2007296136 isPartOf "Proceedings of SPIE, 0277-786X ; v. 6463".
- 2007296136 isPartOf "Proceedings of SPIE--the International Society for Optical Engineering ; v. 6463.".
- 2007296136 issued "2007".
- 2007296136 issued "c2007.".
- 2007296136 language "eng".
- 2007296136 publisher "Bellingham, Wash. : SPIE,".
- 2007296136 subject "621.381 22".
- 2007296136 subject "Microelectromechanical systems Reliability Congresses.".
- 2007296136 subject "Microelectromechanical systems Testing Congresses.".
- 2007296136 subject "Microelectronic packaging Congresses.".
- 2007296136 subject "TK7875 .R438 2007".
- 2007296136 title "Reliability, packaging, testing, and characterization of MEMS/MOEMS VI : 23-24 January, 2007, San Jose, California, USA / Allyson L. Hartzell, Rajeshuni Ramesham, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering.".
- 2007296136 type "text".