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- 2007299154 contributor B10834546.
- 2007299154 contributor B10834547.
- 2007299154 created "c2007.".
- 2007299154 date "2007".
- 2007299154 date "c2007.".
- 2007299154 dateCopyrighted "c2007.".
- 2007299154 description "Includes bibliographical references and author index.".
- 2007299154 extent "1 v. (various pagings) :".
- 2007299154 identifier "0819465771".
- 2007299154 identifier "9780819465771".
- 2007299154 identifier 2007299154.html.
- 2007299154 isPartOf "Proceedings of SPIE, 0277-786X ; v. 6464".
- 2007299154 isPartOf "Proceedings of SPIE--the International Society for Optical Engineering ; v. 6464.".
- 2007299154 issued "2007".
- 2007299154 issued "c2007.".
- 2007299154 language "eng".
- 2007299154 publisher "Bellingham, Wash. : SPIE,".
- 2007299154 subject "621.381 22".
- 2007299154 subject "Microelectromechanical systems Congresses.".
- 2007299154 subject "Optoelectronic devices Congresses.".
- 2007299154 subject "TK7875 .M45377 2007".
- 2007299154 title "MEMS/MOEMS components and their applications IV : 22-23 January 2007, San Jose, California, USA / Srinivas A. Tadigadapa, Reza Ghodssi, Albert K. Henning, chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering.".
- 2007299154 type "text".