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- 2007299339 alternative "23rd European Mask and Lithography Conference".
- 2007299339 alternative "European Conference on Mask Technology for Integrated Circuits and Microcomponents".
- 2007299339 alternative "European Mask and Lithography Conference".
- 2007299339 contributor B10834717.
- 2007299339 contributor B10834718.
- 2007299339 contributor B10834719.
- 2007299339 created "c2007.".
- 2007299339 date "2007".
- 2007299339 date "c2007.".
- 2007299339 dateCopyrighted "c2007.".
- 2007299339 description "Includes bibliographical references and author index.".
- 2007299339 extent "1 v. (various pagings) :".
- 2007299339 identifier "0819466557".
- 2007299339 identifier "9780819466556".
- 2007299339 isPartOf "Proceedings of SPIE, 0277-786X ; v. 6533".
- 2007299339 isPartOf "Proceedings of SPIE--the International Society for Optical Engineering ; v. 6533.".
- 2007299339 issued "2007".
- 2007299339 issued "c2007.".
- 2007299339 language "eng".
- 2007299339 publisher "Bellingham, Wash., : SPIE,".
- 2007299339 subject "621.3815/31 22".
- 2007299339 subject "Integrated circuits Masks Congresses.".
- 2007299339 subject "Microlithography Congresses.".
- 2007299339 subject "TK7872.M3 E98 2007".
- 2007299339 title "23rd European Mask and Lithography Conference".
- 2007299339 title "EMLC 2007 : 23rd European Mask and Lithography Conference : 22-25 January 2007, Grenoble, France / Uwe F.W. Behringer, chair/editor ; Wilhelm Maurer, Jacques Waelpoel, program chairs ; organized by VDE/VDI GMM--the Society for Microelectronics, Micro- and Precision Engineering (Germany) ; cooperating organizations, CEA-LETI (France) ... [et al.] ; published by SPIE--the International Society for Optical Engineering.".
- 2007299339 title "European Conference on Mask Technology for Integrated Circuits and Microcomponents".
- 2007299339 title "European Mask and Lithography Conference".
- 2007299339 type "text".