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- 2007338293 contributor B10864654.
- 2007338293 contributor B10864655.
- 2007338293 contributor B10864656.
- 2007338293 created "c2002.".
- 2007338293 date "2002".
- 2007338293 date "c2002.".
- 2007338293 dateCopyrighted "c2002.".
- 2007338293 description "Includes bibliographic references and author index.".
- 2007338293 extent "xxvi, 341, [5] p. :".
- 2007338293 hasFormat "Also available via the World Wide Web.".
- 2007338293 identifier "4891140313".
- 2007338293 isFormatOf "Also available via the World Wide Web.".
- 2007338293 issued "2002".
- 2007338293 issued "c2002.".
- 2007338293 language "eng".
- 2007338293 publisher "Tokyo, Japan : Business Center for Academic Societies Japan,".
- 2007338293 relation "Also available via the World Wide Web.".
- 2007338293 subject "621.39/5 22".
- 2007338293 subject "Integrated circuits Very large scale integration Design and construction. Congresses.".
- 2007338293 subject "Lithography Congresses.".
- 2007338293 subject "Microelectronics Congresses.".
- 2007338293 subject "Nanotechnology Congresses.".
- 2007338293 subject "TK7875 .I585 2002".
- 2007338293 title "Microprocesses and nanotechnology 2002 : digest of papers : 2002 International Microprocesses and Nanotechnology Conference : November 6-8, 2002, Tokyo, Japan / sponsored by the Japan Society of Applied Physics ; technical-cosponsored [by] IEEE Electron Device Society ; cooperation, American Vacuum Society ... [et al.].".
- 2007338293 type "text".