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- 2007440237 contributor B10966577.
- 2007440237 created "2004.".
- 2007440237 date "2004".
- 2007440237 date "2004.".
- 2007440237 dateCopyrighted "2004.".
- 2007440237 description "Includes bibliographical references.".
- 2007440237 extent "369 p. :".
- 2007440237 identifier "3832227458 (pbk.)".
- 2007440237 identifier "9783832227456 (pbk.)".
- 2007440237 isPartOf "Berichte aus der Mikrosystemtechnik, 1610-5907".
- 2007440237 issued "2004".
- 2007440237 issued "2004.".
- 2007440237 language "eng".
- 2007440237 publisher "Aachen : Shaker,".
- 2007440237 subject "670.42 22".
- 2007440237 subject "Detectors Design and construction.".
- 2007440237 subject "Microelectromechanical systems Design and construction.".
- 2007440237 subject "TK7875 .P76 2004".
- 2007440237 title "Production techniques for application specific microsensors / Günter Köhler, Thomas Schroeter, Guido Tschulena (eds).".
- 2007440237 type "text".