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- 2007466337 contributor B10989600.
- 2007466337 contributor B10989601.
- 2007466337 created "2006.".
- 2007466337 date "2006".
- 2007466337 date "2006.".
- 2007466337 dateCopyrighted "2006.".
- 2007466337 description "Includes bibliographical references.".
- 2007466337 extent "190 p. ;".
- 2007466337 identifier "5948360393".
- 2007466337 isPartOf "Mir ėlektroniki".
- 2007466337 issued "2006".
- 2007466337 issued "2006.".
- 2007466337 language "rus".
- 2007466337 publisher "Moskva : Tekhnosfera,".
- 2007466337 subject "Microelectronics Materials.".
- 2007466337 subject "Precipitation (Chemistry)".
- 2007466337 subject "TK7871 .K57 2006".
- 2007466337 title "Tekhnologii mikroėlektroniki : khimicheskoe osazhdenie iz gazovoĭ fazy / V. Kireev, A. Stoli︠a︡rov.".
- 2007466337 type "text".