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- 2007493119 alternative "InnoSi".
- 2007493119 contributor B11014195.
- 2007493119 contributor B11014196.
- 2007493119 created "c2004.".
- 2007493119 date "2004".
- 2007493119 date "c2004.".
- 2007493119 dateCopyrighted "c2004.".
- 2007493119 extent "144 p. :".
- 2007493119 identifier "3816764614 (pbk. : alk. paper)".
- 2007493119 identifier "9783816764618 (pbk. : alk. paper)".
- 2007493119 issued "2004".
- 2007493119 issued "c2004.".
- 2007493119 language "ger eng".
- 2007493119 language "ger".
- 2007493119 publisher "Stuttgart : Fraunhofer IRB,".
- 2007493119 subject "Semiconductor wafers Design and construction.".
- 2007493119 subject "Silicon crystals.".
- 2007493119 subject "TK7871.85 .I497 2004".
- 2007493119 subject "Thin film devices Design and construction.".
- 2007493119 title "InnoSi".
- 2007493119 type "text".