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- 2008051282 contributor B11132954.
- 2008051282 contributor B11132955.
- 2008051282 created "c2009.".
- 2008051282 date "2009".
- 2008051282 date "c2009.".
- 2008051282 dateCopyrighted "c2009.".
- 2008051282 description "Includes bibliographical references (p. 171-175) and index.".
- 2008051282 extent "xiii, 191 p., [14] p. of plates :".
- 2008051282 identifier "1420059114 (hardcover : alk. paper)".
- 2008051282 identifier "9781420059113 (hardcover : alk. paper)".
- 2008051282 issued "2009".
- 2008051282 issued "c2009.".
- 2008051282 language "eng".
- 2008051282 publisher "Boca Raton, FL : CRC Press/Taylor & Francis Group,".
- 2008051282 subject "621.3815/2 22".
- 2008051282 subject "Chemical mechanical planarization.".
- 2008051282 subject "Nanoelectronics.".
- 2008051282 subject "Nanoparticles.".
- 2008051282 subject "TK7874.84 .P35 2009".
- 2008051282 title "Nanoparticle engineering for chemical-mechanical planarization : fabrication of next-generation nanodevices / Ungyu Paik, Jea-Gun Park.".
- 2008051282 type "text".