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- 2008459617 contributor B11315326.
- 2008459617 created "c2008.".
- 2008459617 date "2008".
- 2008459617 date "c2008.".
- 2008459617 dateCopyrighted "c2008.".
- 2008459617 description "Includes bibliographical references and index.".
- 2008459617 extent "xx, 303 p. :".
- 2008459617 identifier "3527314946".
- 2008459617 identifier "9783527314942".
- 2008459617 identifier 2008459617-b.html.
- 2008459617 identifier 2008459617-d.html.
- 2008459617 identifier 2008459617-t.html.
- 2008459617 isPartOf "Advanced micro & nanosystems ; v.6".
- 2008459617 issued "2008".
- 2008459617 issued "c2008.".
- 2008459617 language "eng".
- 2008459617 publisher "Weinheim : Wiley-VCH,".
- 2008459617 subject "621 22".
- 2008459617 subject "Microelectromechanical systems Reliability.".
- 2008459617 subject "TK7875 .R437 2008".
- 2008459617 title "Reliability of MEMS / edited by Osamu Tabata and Toshiyuki Tsuchiya.".
- 2008459617 type "text".