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- 2009049350 contributor B11452295.
- 2009049350 created "c2009.".
- 2009049350 date "2009".
- 2009049350 date "c2009.".
- 2009049350 dateCopyrighted "c2009.".
- 2009049350 extent "xiv, 477 p. :".
- 2009049350 identifier "9780819475602".
- 2009049350 issued "2009".
- 2009049350 issued "c2009.".
- 2009049350 language "eng".
- 2009049350 publisher "Bellingham, Wash. : SPIE,".
- 2009049350 subject "621.3815/31 22".
- 2009049350 subject "Lasers Industrial applications.".
- 2009049350 subject "Microlithography.".
- 2009049350 subject "Semiconductors Etching.".
- 2009049350 subject "TK7872.M3 .L56 2009".
- 2009049350 title "Optical lithography : here is why / Burn J. Lin.".
- 2009049350 type "text".