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- 2009934298 contributor B11729798.
- 2009934298 created "2009.".
- 2009934298 date "2009".
- 2009934298 date "2009.".
- 2009934298 dateCopyrighted "2009.".
- 2009934298 description "Includes bibliographical references and index.".
- 2009934298 extent "xx, 552 p. :".
- 2009934298 format "pdf/application".
- 2009934298 format "text/html".
- 2009934298 identifier "0387958673 (hbk.)".
- 2009934298 identifier "0387958681".
- 2009934298 identifier "9780387958675 (hbk.)".
- 2009934298 identifier "9780387958682".
- 2009934298 identifier dokserv?id=3227275&prov=M&dok_var=1&dok_ext=htm.
- 2009934298 identifier 9780387958675.pdf.
- 2009934298 issued "2009".
- 2009934298 issued "2009.".
- 2009934298 language "eng".
- 2009934298 publisher "New York ; London : Springer,".
- 2009934298 subject "621.395 22".
- 2009934298 subject "Integrated circuits Ultra large scale integration.".
- 2009934298 subject "Nanoelectromechanical systems.".
- 2009934298 subject "Nanotechnologie. swd".
- 2009934298 subject "TK7874.76 .A38 2009".
- 2009934298 subject "ULSI. swd".
- 2009934298 title "Advanced nanoscale ULSI interconnects : fundamentals and applications / [edited by] Yosi Shacham-Diamand ... [et al.].".
- 2009934298 type "text".