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- 2010010076 contributor B11748644.
- 2010010076 created "2010.".
- 2010010076 date "2010".
- 2010010076 date "2010.".
- 2010010076 dateCopyrighted "2010.".
- 2010010076 description "Includes bibliographical references and index.".
- 2010010076 extent "xiv, 518 p. :".
- 2010010076 identifier "9780470749838".
- 2010010076 identifier 2010010076-b.html.
- 2010010076 identifier 2010010076-d.html.
- 2010010076 identifier 2010010076-t.html.
- 2010010076 issued "2010".
- 2010010076 issued "2010.".
- 2010010076 language "eng".
- 2010010076 publisher "Chichester, West Sussex [England] : John Wiley & Sons,".
- 2010010076 subject "621.381 22".
- 2010010076 subject "Electronic apparatus and appliances.".
- 2010010076 subject "Microelectromechanical systems.".
- 2010010076 subject "Microfabrication.".
- 2010010076 subject "TK7875 .F73 2010".
- 2010010076 title "Introduction to microfabrication / Sami Franssila.".
- 2010010076 type "text".