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- 2010016713 contributor B11756745.
- 2010016713 contributor B11756746.
- 2010016713 created "c2010.".
- 2010016713 date "2010".
- 2010016713 date "c2010.".
- 2010016713 dateCopyrighted "c2010.".
- 2010016713 description "Includes bibliographical references (p. [51]-61) and index.".
- 2010016713 extent "67 p. :".
- 2010016713 identifier "9781616687496 (softcover)".
- 2010016713 issued "2010".
- 2010016713 issued "c2010.".
- 2010016713 language "eng".
- 2010016713 publisher "Hauppauge, N.Y. : Nova Science Publishers,".
- 2010016713 subject "621.381 22".
- 2010016713 subject "Dielectric films.".
- 2010016713 subject "Interconnects (Integrated circuit technology)".
- 2010016713 subject "Microelectronics Materials.".
- 2010016713 subject "Porous materials.".
- 2010016713 subject "TK7871.15.F5 R44 2010".
- 2010016713 title "Low-k nanoporous interdielectrics : materials, thin film fabrications, structures and properties / authors, Moonhor Ree, Jinhwan Yoon, Kyuyoung Heo.".
- 2010016713 type "text".