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- 2010033078 contributor B11776301.
- 2010033078 created "c2011.".
- 2010033078 date "2011".
- 2010033078 date "c2011.".
- 2010033078 dateCopyrighted "c2011.".
- 2010033078 extent "xii, 284 p. :".
- 2010033078 identifier "9781617618376 (hardcover)".
- 2010033078 isPartOf "Engineering tools, techniques and tables".
- 2010033078 isPartOf "Nanotechnology science and technology".
- 2010033078 issued "2011".
- 2010033078 issued "c2011.".
- 2010033078 language "eng".
- 2010033078 publisher "New York : Nova Science,".
- 2010033078 subject "621.3815/31 22".
- 2010033078 subject "Microfabrication.".
- 2010033078 subject "Microlithography.".
- 2010033078 subject "TK7872.M3 L58 2011".
- 2010033078 title "Lithography : principles, processes and materials / Theodore C. Hennessy, editor.".
- 2010033078 type "text".