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- 2010040731 contributor B11785503.
- 2010040731 created "2011.".
- 2010040731 date "2011".
- 2010040731 date "2011.".
- 2010040731 dateCopyrighted "2011.".
- 2010040731 description "Includes bibliographical references and index.".
- 2010040731 extent "xxv, 377 p. :".
- 2010040731 identifier "184821202X (hardback)".
- 2010040731 identifier "9781848212022 (hardback)".
- 2010040731 identifier 9781848212022.jpg.
- 2010040731 issued "2011".
- 2010040731 issued "2011.".
- 2010040731 language "eng".
- 2010040731 publisher "London : ISTE ; Hoboken, NJ : Wiley,".
- 2010040731 subject "621.3815/31 22".
- 2010040731 subject "Microlithography.".
- 2010040731 subject "TK7872.M3 L58 2011".
- 2010040731 title "Lithography : main techniques / edited by Stefan Landis.".
- 2010040731 type "text".
