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- 2010046516 alternative "Nanolithography English".
- 2010046516 contributor B11792447.
- 2010046516 created "2011.".
- 2010046516 date "2011".
- 2010046516 date "2011.".
- 2010046516 dateCopyrighted "2011.".
- 2010046516 description "Ch. 1. X-ray lithography : fundamentals and applications -- ch. 2. NanoImprint lithography -- ch. 3. Lithography techniques using scanning probe microscopy -- ch. 4. Lithography and manipulation based on the optical properties of metal nanostructures -- ch. 5. Patterning with self-assembling block copolymers -- ch. 6. Metrology for lithography.".
- 2010046516 description "Includes bibliographical references and index.".
- 2010046516 extent "xxv, 325 p. :".
- 2010046516 identifier "1848212119".
- 2010046516 identifier "9781848212114".
- 2010046516 identifier 2010046516-d.html.
- 2010046516 issued "2011".
- 2010046516 issued "2011.".
- 2010046516 language "eng fre".
- 2010046516 language "eng".
- 2010046516 publisher "London, UK : ISTE ; Hoboken, NJ : Wiley,".
- 2010046516 subject "621.3815/31 22".
- 2010046516 subject "Nanolithography.".
- 2010046516 subject "TK7872.M3 N3613 2011".
- 2010046516 tableOfContents "Ch. 1. X-ray lithography : fundamentals and applications -- ch. 2. NanoImprint lithography -- ch. 3. Lithography techniques using scanning probe microscopy -- ch. 4. Lithography and manipulation based on the optical properties of metal nanostructures -- ch. 5. Patterning with self-assembling block copolymers -- ch. 6. Metrology for lithography.".
- 2010046516 title "Nano-lithography / edited by Stefan Landis.".
- 2010046516 type "text".