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- 2010054087 contributor B11801624.
- 2010054087 created "c2012.".
- 2010054087 date "2012".
- 2010054087 date "c2012.".
- 2010054087 dateCopyrighted "c2012.".
- 2010054087 description "Includes bibliographical references and index.".
- 2010054087 extent "xiv, 562 p. :".
- 2010054087 identifier "0132497360 (alk. paper)".
- 2010054087 identifier "9780132497367 (alk. paper)".
- 2010054087 issued "2012".
- 2010054087 issued "c2012.".
- 2010054087 language "eng".
- 2010054087 publisher "Upper Saddle River, N.J. : Prentice Hall,".
- 2010054087 subject "621.381 22".
- 2010054087 subject "Microelectromechanical systems.".
- 2010054087 subject "TK7875 .L48 2012".
- 2010054087 title "Foundations of MEMS / Chang Liu.".
- 2010054087 type "text".