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- 2010278239 alternative "Acoustic wave & electromechanical resonators".
- 2010278239 contributor B11804817.
- 2010278239 created "c2010.".
- 2010278239 date "2010".
- 2010278239 date "c2010.".
- 2010278239 dateCopyrighted "c2010.".
- 2010278239 description "1. MEMs and NEMs resonator technologies -- 2. Acoustic microresonator technologies -- 3. Design and modeling of micro- and nanoresonators -- 4. Fabrication techniques -- 5. Characterization techniques -- 6. Performance optimization -- 7. Integration of resonator to CMOS technologies -- 8. Sensor applications -- 9. Radio frequency applications -- 10. Case studies.".
- 2010278239 description "Includes bibliographical references and index.".
- 2010278239 extent "xv, 345 p. :".
- 2010278239 identifier "1607839776".
- 2010278239 identifier "9781607839774".
- 2010278239 isPartOf "Artech House integrated microsystems series.".
- 2010278239 isPartOf "Integrated microsystems series".
- 2010278239 issued "2010".
- 2010278239 issued "c2010.".
- 2010278239 language "eng".
- 2010278239 publisher "Norwood, MA. : Artech House,".
- 2010278239 subject "621.3815/4 23".
- 2010278239 subject "Acoustic surface wave devices.".
- 2010278239 subject "Electric resonators.".
- 2010278239 subject "TK5981 .C347 2010".
- 2010278239 tableOfContents "1. MEMs and NEMs resonator technologies -- 2. Acoustic microresonator technologies -- 3. Design and modeling of micro- and nanoresonators -- 4. Fabrication techniques -- 5. Characterization techniques -- 6. Performance optimization -- 7. Integration of resonator to CMOS technologies -- 8. Sensor applications -- 9. Radio frequency applications -- 10. Case studies.".
- 2010278239 title "Acoustic wave & electromechanical resonators".
- 2010278239 title "Acoustic wave and electromechanical resonators : concept to key applications / Humberto Campanella.".
- 2010278239 type "text".