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- 2010287768 contributor B11815394.
- 2010287768 contributor B11815395.
- 2010287768 created "c2008.".
- 2010287768 date "2008".
- 2010287768 date "c2008.".
- 2010287768 dateCopyrighted "c2008.".
- 2010287768 description "Includes bibliographical references and index.".
- 2010287768 extent "1 v. (various pagings) :".
- 2010287768 identifier "0819471917".
- 2010287768 identifier "9780819471918".
- 2010287768 isPartOf "Proceedings of SPIE, 0277-786X ; v. 6993".
- 2010287768 isPartOf "Proceedings of SPIE--the International Society for Optical Engineering ; v. 6993.".
- 2010287768 issued "2008".
- 2010287768 issued "c2008.".
- 2010287768 language "eng".
- 2010287768 publisher "Bellingham, Wash. : SPIE,".
- 2010287768 subject "621 22".
- 2010287768 subject "Microelectromechanical systems Congresses.".
- 2010287768 subject "Micromachining Congresses.".
- 2010287768 subject "Optoelectronic devices Congresses.".
- 2010287768 subject "TK7875 .M453762 2008".
- 2010287768 title "MEMS, MOEMS, and micromachining III : 9-10 April 2008, Strasbourg, France / Hakan Urey, editor ; sponsored by SPIE Europe ; cosponsored by Alsace international (France) ... [et al.] ; cooperating organizations, AFOP--Association française des industries de l'optique et de la photonique (France) ... [et al.].".
- 2010287768 type "text".