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- 2010287952 contributor B11815726.
- 2010287952 contributor B11815727.
- 2010287952 created "c2008.".
- 2010287952 date "2008".
- 2010287952 date "c2008.".
- 2010287952 dateCopyrighted "c2008.".
- 2010287952 description "Includes bibliographical references and author index.".
- 2010287952 extent "1 v. (various pagings) :".
- 2010287952 identifier "0819470627 (pbk.)".
- 2010287952 identifier "9780819470621 (pbk.)".
- 2010287952 isPartOf "Proceedings of SPIE, 0277-786X ; v. 6887".
- 2010287952 isPartOf "Proceedings of SPIE--the International Society for Optical Engineering ; v. 6887.".
- 2010287952 issued "2008".
- 2010287952 issued "c2008.".
- 2010287952 language "eng".
- 2010287952 publisher "Bellingham, Wash. : SPIE,".
- 2010287952 subject "621.381 23".
- 2010287952 subject "Microelectromechanical systems Congresses.".
- 2010287952 subject "Micromechanics Congresses.".
- 2010287952 subject "Miniature electronic equipment Congresses.".
- 2010287952 subject "Optical scanners Congresses.".
- 2010287952 subject "TK7874 .M532565 2008".
- 2010287952 title "MOEMS and miniaturized systems VII : 22-23 January 2008, San Jose, California, USA / David L. Dickensheets, Harald Schenk, editors ; sponsored by SPIE ; cosponsored by the Photonics Center at Boston University (USA).".
- 2010287952 type "text".