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- 2010455194 contributor B11960748.
- 2010455194 contributor B11960749.
- 2010455194 created "c2008.".
- 2010455194 date "2008".
- 2010455194 date "c2008.".
- 2010455194 dateCopyrighted "c2008.".
- 2010455194 description "Includes bibliographical references and author index.".
- 2010455194 extent "1 v. (various pagings) :".
- 2010455194 identifier "0819470570".
- 2010455194 identifier "9780819470577".
- 2010455194 isPartOf "Proceedings of SPIE, $x 0277-786X ; v. 6882".
- 2010455194 isPartOf "Proceedings of SPIE--the International Society for Optical Engineering ; v. 6882.".
- 2010455194 issued "2008".
- 2010455194 issued "c2008.".
- 2010455194 language "eng".
- 2010455194 publisher "Bellingham, Wash. : SPIE,".
- 2010455194 subject "671.3/5 22".
- 2010455194 subject "Electromechanical devices Design and construction Congresses.".
- 2010455194 subject "Microfabrication Congresses.".
- 2010455194 subject "Micromachining Congresses.".
- 2010455194 subject "Miniature electronic equipment Design and construction Congresses.".
- 2010455194 subject "TJ1191.5 .M55243234 2008".
- 2010455194 title "Micromachining and microfabrication process technology XIII : 22-23 January 2008, San Jose, California, USA / Mary-Ann Maher, Jung-Chih Chiao, Paul J. Resnick, editors ; sponsored by SPIE ; cosponsored by the Photonics Center at Boston University (USA).".
- 2010455194 type "text".